Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He; W. W. Wu; Y. L. Chueh; C. L. Hsin; L. J. Chen; L. J. Chou

doi:10.1063/1.2136219

Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He^*, W. W. Wu, Y. L. Chueh, C. L. Hsin, L. J. Chen, L. J. Chou

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

Original language	English (US)
Article number	223102
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	22
DOIs	https://doi.org/10.1063/1.2136219
State	Published - 2005
Externally published	Yes

Bibliographical note

Funding Information:
The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots",

abstract = "The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.",

author = "He, {J. H.} and Wu, {W. W.} and Chueh, {Y. L.} and Hsin, {C. L.} and Chen, {L. J.} and Chou, {L. J.}",

note = "Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.",

year = "2005",

doi = "10.1063/1.2136219",

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pages = "1--3",

journal = "Applied Physics Letters",

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AU - He, J. H.

AU - Wu, W. W.

AU - Chueh, Y. L.

AU - Hsin, C. L.

AU - Chen, L. J.

AU - Chou, L. J.

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PY - 2005

Y1 - 2005

N2 - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

AB - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

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DO - 10.1063/1.2136219

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JF - Applied Physics Letters

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Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

Abstract

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