Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics. © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Bibliographical noteKAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors acknowledge financial support under Baseline Research Funding from King Abdullah University of Science and Technology, the Provost Award (to GTS and AH) and the GRP Collaborative Fellow Award (to SI) (GRP-CF-2011-01-S). We also thank Kelly Rader for proof reading the manuscript.
ASJC Scopus subject areas
- General Medicine