The asymmetric Fano resonance lineshapes, resulting from interference between background and a resonant scattering, is archetypal in resonant waveguide grating (RWG) reflectivity. Resonant profile shift resulting from a change of refractive index (from fluid medium or biomolecules at the chip surface) is classically used to perform label-free sensing. Lineshapes are sometimes sampled at discretized “detuning” values to relax instrumental demands, the highest reflectivity element giving a coarse resonance estimate. A finer extraction, needed to increase sensor sensitivity, can be obtained using a correlation approach, correlating the sensed signal to a zero-shifted reference signal. Fabrication process is presented leading to discrete Fano profiles. Our findings are illustrated with resonance profiles from silicon nitride RWGs operated at visible wavelengths. We recently demonstrated that direct imaging multi-assay RWGs sensing may be rendered more reliable using “chirped” RWG chips, by varying a RWG structure parameter. Then, the spatial reflectivity profiles of tracks composed of RWGs units with slowly varying filling factor (thus slowly varying resonance condition) are measured under monochromatic conditions. Extracting the resonance location using spatial Fano profiles allows multiplex refractive index based sensing. Discretization and sensitivity are discussed both through simulation and experiment for different filling factor variation, here Δf=0.0222 and Δf=0.0089. This scheme based on a “Peak-tracking chip” demonstrates a new technique for bioarray imaging using a simpler set-up that maintains high performance with cheap lenses, with down to Δn=2×10-5 RIU sensitivity for the highest sampling of Fano lineshapes. © (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.