Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotropic wet etching

Engineering

• Nanoimprint Lithography 100%
• Nanometre 50%
• Two Dimensional 50%
• Scale Range 50%
• Etching Process 50%
• Complex Shape 50%
• Dimensional Structure 50%
• Patterning Technique 50%
• Atomic Force Microscopy 50%
• Nanomechanics 50%
• Dimensional Patterning 50%
• Casting Process 50%

Material Science

• Wet Etching 100%
• Nanoimprint Lithography 100%
• Scanning Electron Microscopy 50%
• Surface Roughness 50%
• Nanomechanics 50%
• Atomic Force Microscopy 50%

Keyphrases

• Three-dimensional Structuring 66%