Fabrication of three-dimensional MIS nano-capacitor based on nano-imprinted single crystal silicon nanowire arrays

Yujia Zhai, Marylene Palard, Leo Mathew, Muhammad Mustafa Hussain, Grant Grant Willson, Emanuel Tutuc, Sanjay Kumar Banerjee

    Research output: Contribution to journal › Article › peer-review

    4 Scopus citations

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    Material Science

    Engineering