Fabrication of sol-gel-derived optical waveguide on InP for hybridized photonics applications

J. Liu*, Y. L. Lam, Y. C. Chan, Y. Zhou, W. X. Que, B. S. Ooi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


In this paper, we report on the first successful fabrication, using spin-coating and low-temperature (200 °C) annealing, of organically modified sol-gel planar optical waveguides on InP substrates. Considering the fact that the sol-gel technique is simple and cheap, and III-V compound semiconductors are the essential substrate materials for manufacturing data communication devices, we believe that our demonstration of optical waveguiding in sol-gel-derived waveguides on III-V compound semiconductors is interesting. It opens the possibility of hybridizating traditional glass or optical-crystal-based integrated optics with III-V compound semiconductor-based optoelectronics.

Original languageEnglish (US)
Pages (from-to)649-651
Number of pages3
JournalApplied Physics A: Materials Science and Processing
Issue number6
StatePublished - Dec 1999
Externally publishedYes

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science


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