Abstract
In this paper, we report on the first successful fabrication, using spin-coating and low-temperature (200 °C) annealing, of organically modified sol-gel planar optical waveguides on InP substrates. Considering the fact that the sol-gel technique is simple and cheap, and III-V compound semiconductors are the essential substrate materials for manufacturing data communication devices, we believe that our demonstration of optical waveguiding in sol-gel-derived waveguides on III-V compound semiconductors is interesting. It opens the possibility of hybridizating traditional glass or optical-crystal-based integrated optics with III-V compound semiconductor-based optoelectronics.
Original language | English (US) |
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Pages (from-to) | 649-651 |
Number of pages | 3 |
Journal | Applied Physics A: Materials Science and Processing |
Volume | 69 |
Issue number | 6 |
DOIs | |
State | Published - Dec 1999 |
Externally published | Yes |
ASJC Scopus subject areas
- General Chemistry
- General Materials Science