Fabrication of semi-continuous profile diffractive optical elements for beam shaping by electron beam lithography

A. Nottola*, A. Gerardino, M. Gentili, E. Di Fabrizio, S. Cabrini, P. Melpignano, G. Rotaris

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Material Science

Chemical Engineering