Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution

E. Di Fabrizio; M. Gentili; L. Mastrogiacomo

doi:10.1016/S0167-9317(99)00053-2

Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution

E. Di Fabrizio^*, M. Gentili, L. Mastrogiacomo

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Abstract

Silicon micromachining is an attractive technique for a wide class of miniaturized components and systems. We have designed and fabricated several self-standing devices based on surface and bulk micromachining techniques. Our process makes use of Silicon Nitride membranes, which are patterned by electron beam (e-beam) lithography and removed after pattern metallization by reactive ion etching. The fabricated microstructures can be moved and adjusted by electromagnetic actuation.

Original language	English (US)
Pages (from-to)	161-164
Number of pages	4
Journal	Microelectronic Engineering
Volume	46
Issue number	1
DOIs	https://doi.org/10.1016/S0167-9317(99)00053-2
State	Published - May 1999
Externally published	Yes
Event	Proceedings of the 1998 International Conference on Micro- and Nanofabrication (MNE98) - Leuven Duration: Sep 22 1998 → Sep 24 1998

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/S0167-9317(99)00053-2

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title = "Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution",

abstract = "Silicon micromachining is an attractive technique for a wide class of miniaturized components and systems. We have designed and fabricated several self-standing devices based on surface and bulk micromachining techniques. Our process makes use of Silicon Nitride membranes, which are patterned by electron beam (e-beam) lithography and removed after pattern metallization by reactive ion etching. The fabricated microstructures can be moved and adjusted by electromagnetic actuation.",

author = "{Di Fabrizio}, E. and M. Gentili and L. Mastrogiacomo",

year = "1999",

month = may,

doi = "10.1016/S0167-9317(99)00053-2",

language = "English (US)",

volume = "46",

pages = "161--164",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

number = "1",

note = "Proceedings of the 1998 International Conference on Micro- and Nanofabrication (MNE98) ; Conference date: 22-09-1998 Through 24-09-1998",

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T1 - Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution

AU - Di Fabrizio, E.

AU - Gentili, M.

AU - Mastrogiacomo, L.

PY - 1999/5

Y1 - 1999/5

N2 - Silicon micromachining is an attractive technique for a wide class of miniaturized components and systems. We have designed and fabricated several self-standing devices based on surface and bulk micromachining techniques. Our process makes use of Silicon Nitride membranes, which are patterned by electron beam (e-beam) lithography and removed after pattern metallization by reactive ion etching. The fabricated microstructures can be moved and adjusted by electromagnetic actuation.

AB - Silicon micromachining is an attractive technique for a wide class of miniaturized components and systems. We have designed and fabricated several self-standing devices based on surface and bulk micromachining techniques. Our process makes use of Silicon Nitride membranes, which are patterned by electron beam (e-beam) lithography and removed after pattern metallization by reactive ion etching. The fabricated microstructures can be moved and adjusted by electromagnetic actuation.

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U2 - 10.1016/S0167-9317(99)00053-2

DO - 10.1016/S0167-9317(99)00053-2

M3 - Conference article

AN - SCOPUS:0033131643

SN - 0167-9317

VL - 46

SP - 161

EP - 164

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1

T2 - Proceedings of the 1998 International Conference on Micro- and Nanofabrication (MNE98)

Y2 - 22 September 1998 through 24 September 1998

ER -

Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution

Abstract

ASJC Scopus subject areas

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