Abstract
Ridge waveguides were fabricated from sol-gel derived Nd-doped SiO2-TiO2-Al2O3 glass films by laser writing lithography and reactive ion etching. The top surface of the ridge is smooth as a result of the Ti-Ni cap protection. However, the side-wall and the etched substrate are much rougher.
Original language | English (US) |
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Pages (from-to) | 820-821 |
Number of pages | 2 |
Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
Volume | 2 |
State | Published - 1999 |
Externally published | Yes |
Event | Proceedings of the 1999 12th Annual Meeting IEEE Lasers and Electro-Optics Society (LEOS'99) - San Francisco, CA, USA Duration: Nov 8 1999 → Nov 11 1999 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering