Fabrication of Perovskite/Si periodic microwire arrays via micro-pump fluidic strategy for optelectronics applications

Xin Bin, Iman S. Roqan

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We explore a micro-pump strategy for injecting perovskite materials into Si micro-channels, allowing fabrication of many perovskite micro-wires (MWs) to form inside the regularly-spaced (periodic) Si micro-grooves (~ 1000 MWs/mm). Mask-free laser interference lithography is used to produce periodic Si micro-channels. The SiO2 layer is deposited on the Si array before pumping perovskite to enhance the device performance. We demonstrate a cost-effective zero-waste fabrication method of highly responsive photodetectors based on uniform perovskite MWs/SiO2/Si periodic arrays.
Original languageEnglish (US)
Title of host publication2021 IEEE 17th International Conference on Group IV Photonics (GFP)
ISBN (Print)978-1-6654-4675-4
StatePublished - Jan 18 2022

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