Fabrication of nanostructures using electron beam interference technique-a proposal

O. Gunawan; S. L. Ng; C. H. Ooi; B. S. Ooi; Y. L. Lam; Y. C. Chan

doi:10.1109/CLEOPR.1999.811430

Fabrication of nanostructures using electron beam interference technique-a proposal

O. Gunawan, S. L. Ng, C. H. Ooi, B. S. Ooi, Y. L. Lam, Y. C. Chan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The fabrication and investigation of low dimensional semiconductor nanostructures have received increasing attention in recent years. The quasi one- and zero-dimensional structures have shown improved optical and electrical properties that increase device performance and enable development of novel devices. Many technological approaches have been developed to define ultrasmall semiconductor structures as in quantum wire and quantum dot fabrication. In this paper, a method based on electron beam interference, for nanostructures fabrication is proposed. Nanoscale wires or gratings, as well as dots, are generated using this method which is simple, maskless and of high throughput.

Original language	English (US)
Title of host publication	CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	314-315
Number of pages	2
ISBN (Electronic)	0780356616, 9780780356610
DOIs	https://doi.org/10.1109/CLEOPR.1999.811430
State	Published - 1999
Externally published	Yes
Event	1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 - Seoul, Korea, Republic of Duration: Aug 30 1999 → Sep 3 1999

Publication series

Name	CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
Volume	2

Other

Other	1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999
Country/Territory	Korea, Republic of
City	Seoul
Period	08/30/99 → 09/3/99

Bibliographical note

Publisher Copyright:
© 1999 IEEE.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Computer Networks and Communications
General Physics and Astronomy

Access to Document

10.1109/CLEOPR.1999.811430

Cite this

Gunawan, O., Ng, S. L., Ooi, C. H., Ooi, B. S., Lam, Y. L., & Chan, Y. C. (1999). Fabrication of nanostructures using electron beam interference technique-a proposal. In CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics (pp. 314-315). Article 811430 (CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.1999.811430

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title = "Fabrication of nanostructures using electron beam interference technique-a proposal",

abstract = "The fabrication and investigation of low dimensional semiconductor nanostructures have received increasing attention in recent years. The quasi one- and zero-dimensional structures have shown improved optical and electrical properties that increase device performance and enable development of novel devices. Many technological approaches have been developed to define ultrasmall semiconductor structures as in quantum wire and quantum dot fabrication. In this paper, a method based on electron beam interference, for nanostructures fabrication is proposed. Nanoscale wires or gratings, as well as dots, are generated using this method which is simple, maskless and of high throughput.",

author = "O. Gunawan and Ng, {S. L.} and Ooi, {C. H.} and Ooi, {B. S.} and Lam, {Y. L.} and Chan, {Y. C.}",

note = "Publisher Copyright: {\textcopyright} 1999 IEEE.; 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 ; Conference date: 30-08-1999 Through 03-09-1999",

year = "1999",

doi = "10.1109/CLEOPR.1999.811430",

language = "English (US)",

series = "CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "314--315",

booktitle = "CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics",

address = "United States",

}

Gunawan, O, Ng, SL, Ooi, CH, Ooi, BS, Lam, YL & Chan, YC 1999, Fabrication of nanostructures using electron beam interference technique-a proposal. in CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics., 811430, CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 314-315, 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999, Seoul, Korea, Republic of, 08/30/99. https://doi.org/10.1109/CLEOPR.1999.811430

Fabrication of nanostructures using electron beam interference technique-a proposal. / Gunawan, O.; Ng, S. L.; Ooi, C. H. et al.
CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics. Institute of Electrical and Electronics Engineers Inc., 1999. p. 314-315 811430 (CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Ooi, B. S.

AU - Lam, Y. L.

AU - Chan, Y. C.

PY - 1999

Y1 - 1999

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AB - The fabrication and investigation of low dimensional semiconductor nanostructures have received increasing attention in recent years. The quasi one- and zero-dimensional structures have shown improved optical and electrical properties that increase device performance and enable development of novel devices. Many technological approaches have been developed to define ultrasmall semiconductor structures as in quantum wire and quantum dot fabrication. In this paper, a method based on electron beam interference, for nanostructures fabrication is proposed. Nanoscale wires or gratings, as well as dots, are generated using this method which is simple, maskless and of high throughput.

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DO - 10.1109/CLEOPR.1999.811430

M3 - Conference contribution

AN - SCOPUS:0033336704

T3 - CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics

SP - 314

EP - 315

BT - CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999

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ER -

Gunawan O, Ng SL, Ooi CH, Ooi BS, Lam YL, Chan YC. Fabrication of nanostructures using electron beam interference technique-a proposal. In CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics. Institute of Electrical and Electronics Engineers Inc. 1999. p. 314-315. 811430. (CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics). doi: 10.1109/CLEOPR.1999.811430

Fabrication of nanostructures using electron beam interference technique-a proposal

Abstract

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Bibliographical note

ASJC Scopus subject areas

Access to Document

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