Abstract
A method based on electron beam interference, for nanostructure fabrication is proposed. Nano scale wires or gratings, as well as dots, generated demonstrate that the method is simple, maskless and has high throughput.
Original language | English (US) |
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Title of host publication | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest |
Publisher | IEEE |
Pages | 314-315 |
Number of pages | 2 |
Volume | 2 |
State | Published - 1999 |
Externally published | Yes |
Event | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) - Seoul, South Korea Duration: Aug 30 1999 → Sep 3 1999 |
Other
Other | Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) |
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City | Seoul, South Korea |
Period | 08/30/99 → 09/3/99 |
ASJC Scopus subject areas
- Physics and Astronomy(all)