Fabrication of nanostructures using electron beam interference technique - a proposal

O. Gunawan; S. L. Ng; C. H. Ooi; B. S. Ooi; Y. L. Lam; Y. C. Chan

Fabrication of nanostructures using electron beam interference technique - a proposal

O. Gunawan^*, S. L. Ng, C. H. Ooi, B. S. Ooi, Y. L. Lam, Y. C. Chan

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A method based on electron beam interference, for nanostructure fabrication is proposed. Nano scale wires or gratings, as well as dots, generated demonstrate that the method is simple, maskless and has high throughput.

Original language	English (US)
Title of host publication	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Publisher	IEEE
Pages	314-315
Number of pages	2
Volume	2
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) - Seoul, South Korea Duration: Aug 30 1999 → Sep 3 1999

Other

Other	Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99)
City	Seoul, South Korea
Period	08/30/99 → 09/3/99

ASJC Scopus subject areas

Physics and Astronomy(all)

Cite this

@inproceedings{ba296a7a4f9d436c980756cf10c57319,

title = "Fabrication of nanostructures using electron beam interference technique - a proposal",

abstract = "A method based on electron beam interference, for nanostructure fabrication is proposed. Nano scale wires or gratings, as well as dots, generated demonstrate that the method is simple, maskless and has high throughput.",

author = "O. Gunawan and Ng, {S. L.} and Ooi, {C. H.} and Ooi, {B. S.} and Lam, {Y. L.} and Chan, {Y. C.}",

year = "1999",

language = "English (US)",

volume = "2",

pages = "314--315",

booktitle = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

publisher = "IEEE",

note = "Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99) ; Conference date: 30-08-1999 Through 03-09-1999",

}

Gunawan, O, Ng, SL, Ooi, CH, Ooi, BS, Lam, YL & Chan, YC 1999, Fabrication of nanostructures using electron beam interference technique - a proposal. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. vol. 2, IEEE, pp. 314-315, Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99), Seoul, South Korea, 08/30/99.

TY - GEN

T1 - Fabrication of nanostructures using electron beam interference technique - a proposal

AU - Gunawan, O.

AU - Ng, S. L.

AU - Ooi, C. H.

AU - Ooi, B. S.

AU - Lam, Y. L.

AU - Chan, Y. C.

PY - 1999

Y1 - 1999

N2 - A method based on electron beam interference, for nanostructure fabrication is proposed. Nano scale wires or gratings, as well as dots, generated demonstrate that the method is simple, maskless and has high throughput.

AB - A method based on electron beam interference, for nanostructure fabrication is proposed. Nano scale wires or gratings, as well as dots, generated demonstrate that the method is simple, maskless and has high throughput.

UR - http://www.scopus.com/inward/record.url?scp=0033336704&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0033336704

VL - 2

SP - 314

EP - 315

BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

PB - IEEE

T2 - Proceedings of the 1999 Pacific Rim Conference on Lasers and Electro-Optcis (CLEO/PACIFIC Rim '99)

Y2 - 30 August 1999 through 3 September 1999

ER -

Fabrication of nanostructures using electron beam interference technique - a proposal

Abstract

Other

ASJC Scopus subject areas

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