Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Weisheng Yue; Zhihong Wang; Xianbin Wang; Longqing Chen; Yang Yang; Basil Chew Joo Siang; Ahad A. Syed; Ka Chun Wong; Xixiang Zhang

doi:10.1166/jnn.2012.5382

Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Weisheng Yue, Zhihong Wang, Xianbin Wang, Longqing Chen, Yang Yang, Basil Chew Joo Siang, Ahad A. Syed, Ka Chun Wong, Xixiang Zhang

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.

Original language	English (US)
Pages (from-to)	696-699
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	12
Issue number	1
DOIs	https://doi.org/10.1166/jnn.2012.5382
State	Published - Jan 1 2012

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

ASJC Scopus subject areas

Biomedical Engineering
Bioengineering
General Materials Science
General Chemistry
Condensed Matter Physics

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title = "Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off",

abstract = "A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright {\textcopyright} 2012 American Scientific Publishers.",

author = "Weisheng Yue and Zhihong Wang and Xianbin Wang and Longqing Chen and Yang Yang and Siang, {Basil Chew Joo} and Syed, {Ahad A.} and Wong, {Ka Chun} and Xixiang Zhang",

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AU - Yue, Weisheng

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AU - Wang, Xianbin

AU - Chen, Longqing

AU - Yang, Yang

AU - Siang, Basil Chew Joo

AU - Syed, Ahad A.

AU - Wong, Ka Chun

AU - Zhang, Xixiang

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PY - 2012/1/1

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AB - A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed. Copyright © 2012 American Scientific Publishers.

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Fabrication of metallic nanostructures of sub-20 nm with an optimized process of E-beam lithography and lift-off

Abstract

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