Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips

Fei Hui; Marc Porti; Montserrat Nafria; Huiling Duan; Mario Lanza

doi:10.1109/CDE.2015.7087444

Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips

Fei Hui, Marc Porti, Montserrat Nafria, Huiling Duan, Mario Lanza

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.

Original language	English (US)
Title of host publication	Proceedings of the 2015 10th Spanish Conference on Electron Devices, CDE 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781479981083
DOIs	https://doi.org/10.1109/CDE.2015.7087444
State	Published - Jan 1 2015
Externally published	Yes

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Generated from Scopus record by KAUST IRTS on 2021-03-16

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10.1109/CDE.2015.7087444

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title = "Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips",

abstract = "Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.",

author = "Fei Hui and Marc Porti and Montserrat Nafria and Huiling Duan and Mario Lanza",

note = "Generated from Scopus record by KAUST IRTS on 2021-03-16",

year = "2015",

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doi = "10.1109/CDE.2015.7087444",

language = "English (US)",

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Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips. / Hui, Fei; Porti, Marc; Nafria, Montserrat et al.
Proceedings of the 2015 10th Spanish Conference on Electron Devices, CDE 2015. Institute of Electrical and Electronics Engineers Inc., 2015.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips

AU - Hui, Fei

AU - Porti, Marc

AU - Nafria, Montserrat

AU - Duan, Huiling

AU - Lanza, Mario

N1 - Generated from Scopus record by KAUST IRTS on 2021-03-16

PY - 2015/1/1

Y1 - 2015/1/1

N2 - Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.

AB - Scanning probe microscopes (SPM) are commonly used for characterization of the topographic and electrical properties of materials at the nanoscale. In such setup, the probes play a prominent role to obtain reliable imaging, but most tips lose their intrinsic properties after some measurements. Here, we modified the metal varnished atomic force microscope tips by transferring a sheet of graphene on them. The resulting graphene micro-electromechanical system (MEMS) - AFM tips are characterized by means of optical microscope, scanning electron microscope (SEM), energy dispersive X-ray microscope (EDX) and atomic force microscope (AFM). Our graphene-coated tips achieved lifetimes 10 times larger than the uncoated counterparts, improving the quality and reducing the cost of research.

UR - http://ieeexplore.ieee.org/document/7087444/

UR - http://www.scopus.com/inward/record.url?scp=84929376762&partnerID=8YFLogxK

U2 - 10.1109/CDE.2015.7087444

DO - 10.1109/CDE.2015.7087444

M3 - Conference contribution

SN - 9781479981083

BT - Proceedings of the 2015 10th Spanish Conference on Electron Devices, CDE 2015

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Fabrication of graphene MEMS by standard transfer: High performance atomic force microscope tips

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