Fabrication of an inexpensive cleanroom module for microsystem testing

R. W. Johnstone; S. H. Tsang; I. G. Foulds; S. W. Lee; D. Sameoto; M. Parameswaran

doi:10.1088/0960-1317/17/8/N01

Fabrication of an inexpensive cleanroom module for microsystem testing

R. W. Johnstone^*, S. H. Tsang, I. G. Foulds, S. W. Lee, D. Sameoto, M. Parameswaran

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We have built a freestanding cleanroom module for microsystem testing. The environment has an interior floor space of 4.3 m × 2.1 m and a ceiling of 2.4 m (8 feet). The cleanroom module can be operated as a class 10 000 environment, and the cost of materials was less than CDN$1900. In this paper, we describe the construction and testing of our cleanroom module.

Original language	English (US)
Article number	N01
Pages (from-to)	N47-N51
Journal	Journal of Micromechanics and Microengineering
Volume	17
Issue number	8
DOIs	https://doi.org/10.1088/0960-1317/17/8/N01
State	Published - Aug 1 2007
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/17/8/N01

Cite this

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Fabrication of an inexpensive cleanroom module for microsystem testing

Abstract

ASJC Scopus subject areas

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