Fabrication of 3-μm diameter pin hole array (PHA) on thick W substrates

T. Levato*, N. C. Pathak, C. A. Cecchetti, O. Ciricosta, P. Koester, L. Labate, A. Giulietti, D. Giulietti, F. De Angelis, E. Di Fabrizio, P. Delogu, L. A. Gizzi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations


Pin-hole arrays are used for a variety of applications including, for example, X-ray imaging of laser-plasmas for fusion relevant studies [1]. More recently, a novel X-ray imaging technique has been proposed (this conference L.A. Gizzi et al.) within the High Power Laser Energy Research Facility (HiPER) to obtain spectrally resolved X-ray imaging [2] using single photon detection [3]. This technique requires a large number of images or, alternatively, large arrays of pin-holes, possibly with very small diameter («10 μm) [4]. In view of this, a technique was implemented for the fabrication of large arrays of pin-holes in thick metal substrates. Here we report on the optimizations of the laser-matter interaction process to obtain high aspect ratio cylinder-like pin-hole on heavy metal substrate by using a frequency-doubled Ti:Sa femtosecond laser pulses operating at 10Hz. The influence of an air breakdown and a (ns)prepulse, on the drilled pin-hole, is showed by means of SEM images both for surface effects and internal quality of the channels, with evidence of micro and nano-sized structures. The holes drilled at an intensity just below the laser breakdown threshold for plasma creation in air, have an internal diameter of about 3 μm on a W substrate of 70 μm thickness, a micro-cylinder-like shape and no detectable deviations of the axis from a straight line. Arrays of up to 800 pin-holes were produced with the pin-hole properties being highly stable across the array. The final X-ray transmission is showed by using a μ-focus X-ray source.

Original languageEnglish (US)
Title of host publicationThe 2nd International Conference on Ultra-Intense Laser Interaction Science - ULIS 2009
Number of pages4
StatePublished - Feb 22 2010
Externally publishedYes
Event2nd International Conference on Ultra-Intense Laser Interaction Science - ULIS 2009 - Frascati, Italy
Duration: May 24 2009May 29 2009

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other2nd International Conference on Ultra-Intense Laser Interaction Science - ULIS 2009


  • Metal mesh holes
  • Ultrafast ablation
  • X-ray energy resolved imaging
  • X-ray pin hole array
  • X-ray single shot imaging

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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