Fabrication of 0.15 im SOI p-MOSFKTs using synchrotron radiation X-ray lithography

Sang Soo Choi, Young Jin Jeon, Jong Son Lyu, Hyung Joun Yoo, Enzo Di Fabrizio, Luca Grclla, Massimo Gentili

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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