Exposure latitude and CD control study for additively patterned x-ray mask with GBit DRAM complexity

M. Baciocchi^*, E. Di Fabrizio, M. Gentili, L. Grella, L. Maggiora, L. Mastrogiacomo, D. Peschiaroli, S. Choi, Y. J. Jeon, H. B. Chung, H. J. Yoo

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review