Exploiting nonlinearities of micro-machined resonators for filtering applications

Saad Ilyas, K. N. Chappanda, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

32 Scopus citations


We demonstrate the exploitation of the nonlinear behavior of two electrically coupled microbeam resonators to realize a band-pass filter. More specifically, we combine their nonlinear hardening and softening responses to realize a near flat pass band filter with sharp roll-off characteristics. The device is composed of two near identical doubly clamped and electrostatically actuated microbeams made of silicon. One of the resonators is buckled via thermal loading to produce a softening frequency response. It is then further tuned to create the desired overlap with the second resonator response of hardening behavior. This overlapping improves the pass band flatness. Also, the sudden jumps due to the softening and hardening behaviors create sharp roll-off characteristics. This approach can be promising for the future generation of filters with superior characteristics.
Original languageEnglish (US)
Pages (from-to)253508
JournalApplied Physics Letters
Issue number25
StatePublished - Jun 21 2017

Bibliographical note

KAUST Repository Item: Exported on 2021-08-27
Acknowledgements: This research has been supported by the King Abdullah University of Science and Technology (KAUST) research fund.

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


Dive into the research topics of 'Exploiting nonlinearities of micro-machined resonators for filtering applications'. Together they form a unique fingerprint.

Cite this