Exploiting nonlinear bahavior of mems resonators for filter applications

Saad Ilyas; Mohammad I. Younis

doi:10.1115/DETC2017-67863

Exploiting nonlinear bahavior of mems resonators for filter applications

Saad Ilyas, Mohammad I. Younis^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter's pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

Original language	English (US)
Title of host publication	22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791858165
DOIs	https://doi.org/10.1115/DETC2017-67863
State	Published - 2017
Event	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 - Cleveland, United States Duration: Aug 6 2017 → Aug 9 2017

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Conference

Conference	ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017
Country/Territory	United States
City	Cleveland
Period	08/6/17 → 08/9/17

Bibliographical note

Publisher Copyright:
© Copyright 2017 ASME.

ASJC Scopus subject areas

Mechanical Engineering
Computer Science Applications
Computer Graphics and Computer-Aided Design
Modeling and Simulation

Access to Document

10.1115/DETC2017-67863

Cite this

Ilyas, S., & Younis, M. I. (2017). Exploiting nonlinear bahavior of mems resonators for filter applications. In 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2017-67863

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title = "Exploiting nonlinear bahavior of mems resonators for filter applications",

abstract = "We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter's pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.",

author = "Saad Ilyas and Younis, {Mohammad I.}",

note = "Publisher Copyright: {\textcopyright} Copyright 2017 ASME.; ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017 ; Conference date: 06-08-2017 Through 09-08-2017",

year = "2017",

doi = "10.1115/DETC2017-67863",

language = "English (US)",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems",

}

Ilyas, S & Younis, MI 2017, Exploiting nonlinear bahavior of mems resonators for filter applications. in 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME), ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2017, Cleveland, United States, 08/6/17. https://doi.org/10.1115/DETC2017-67863

Exploiting nonlinear bahavior of mems resonators for filter applications. / Ilyas, Saad; Younis, Mohammad I.
22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2017. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter's pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

AB - We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter's pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

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Y2 - 6 August 2017 through 9 August 2017

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Exploiting nonlinear bahavior of mems resonators for filter applications

Abstract

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Bibliographical note

ASJC Scopus subject areas

Access to Document

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