EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

Saad Ilyas, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.
Original languageEnglish (US)
Title of host publicationVolume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers
ISBN (Print)9780791858165
DOIs
StatePublished - 2017

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