Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

Abdallah Ramini; Amal Hajjaj; Mohammad I. Younis

doi:10.1115/detc2016-59538

Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

Abdallah Ramini, Amal Hajjaj, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

Original language	English (US)
Title of host publication	Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Publisher	ASME International
ISBN (Print)	9780791850183
DOIs	https://doi.org/10.1115/detc2016-59538
State	Published - Dec 5 2016

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@inproceedings{8e0b94095f6b4aae9624116e33e88e45,

title = "Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators",

abstract = "We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.",

author = "Abdallah Ramini and Amal Hajjaj and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2016",

month = dec,

day = "5",

doi = "10.1115/detc2016-59538",

language = "English (US)",

isbn = "9780791850183",

booktitle = "Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control",

publisher = "ASME International",

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TY - GEN

T1 - Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

AU - Ramini, Abdallah

AU - Hajjaj, Amal

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2016/12/5

Y1 - 2016/12/5

N2 - We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

AB - We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.

UR - http://hdl.handle.net/10754/623227

UR - http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=2592031

U2 - 10.1115/detc2016-59538

DO - 10.1115/detc2016-59538

M3 - Conference contribution

SN - 9780791850183

BT - Volume 6: 12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control

PB - ASME International

ER -

Experimental Investigation of 2:1 and 3:1 Internal Resonances in Nonlinear MEMS Arch Resonators

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