Experimental and theoretical investigation of the 2:1 internal resonance in the higher-order modes of a MEMS microbeam at elevated excitations

Laura Ruzziconi, Nizar Jaber, Lakshmoji Kosuru, Mohammed Lamine Faycal Bellaredj, Mohammad I. Younis

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We analyze the dynamics induced by a 2:1 internal resonance between the third (second symmetric) and the fifth (third symmetric) mode of a MEMS microbeam. An extensive experimental investigation is conducted, where forward and backward sweeps are systematically acquired up to elevated excitations. As ramping the voltage, a change along the forward sweep of the resonant branch is noted. This is analyzed via the combined use of different analytical and numerical tools, which show a phase shift between the modes involved in the 2:1 internal resonance. Constantly referring to the experimental data, simulations examine the underlying features of the system's behavior. The dynamics observed in the experimental frequency sweeps are part of a more complex scenario, where different attractors appear and coexist. The experimental behavior bifurcation chart is reported and compared with simulations, which offers a comprehensive view of the 2:1 internal resonance activation. The concurrence of numerical results and experimental data confirms on the effective actuality of these complex features in safe conditions, along wide ranges of the parameters space.
Original languageEnglish (US)
Pages (from-to)115983
JournalJournal of Sound and Vibration
StatePublished - Jan 2021

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