Abstract
In this work we demonstrate the uniform resistive switching (RS) behavior of Cu/Poly-Si/TiN CBRAM crossbar structure device. A significant improvement in endurance is demonstrated in Poly-Si CBRAM device compared to Silicon dioxide (SiO2) based device. The Cu/Poly-Si/TiN CBRAM device exhibits excellent memory performance, such as high ON/OFF resistance ratio, high endurance and good retention time (104 s). In addition to the experimental study, this work presents a numerical model for the Cu/Poly-Si/TiN CBRAM device. The simulation results based on this model perfectly match the experimental measurements.
Original language | English (US) |
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Title of host publication | 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 217-219 |
Number of pages | 3 |
ISBN (Print) | 9781538637111 |
DOIs | |
State | Published - Jul 26 2018 |
Event | 2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Kobe, Japan Duration: Mar 13 2018 → Mar 16 2018 |
Publication series
Name | 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings |
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Conference
Conference | 2nd IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 |
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Country/Territory | Japan |
City | Kobe |
Period | 03/13/18 → 03/16/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- CBRAM
- Poly-Si
- reliability
- resistive switching
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering