Epitaxial Growth of Two-Dimensional Layered Transition-Metal Dichalcogenides: Growth Mechanism, Controllability, and Scalability

Henan Li, Ying Li, Areej Aljarb, Yumeng Shi, Lain-Jong Li

Research output: Contribution to journalArticlepeer-review

296 Scopus citations


Recently there have been many research breakthroughs in two-dimensional (2D) materials including graphene, boron nitride (h-BN), black phosphors (BPs), and transition-metal dichalcogenides (TMDCs). The unique electrical, optical, and thermal properties in 2D materials are associated with their strictly defined low dimensionalities. These materials provide a wide range of basic building blocks for next-generation electronics. The chemical vapor deposition (CVD) technique has shown great promise to generate high-quality TMDC layers with scalable size, controllable thickness, and excellent electronic properties suitable for both technological applications and fundamental sciences. The capability to precisely engineer 2D materials by chemical approaches has also given rise to fascinating new physics, which could lead to exciting new applications. In this Review, we introduce the latest development of TMDC synthesis by CVD approaches and provide further insight for the controllable and reliable synthesis of atomically thin TMDCs. Understanding of the vapor-phase growth mechanism of 2D TMDCs could benefit the formation of complicated heterostructures and novel artificial 2D lattices.
Original languageEnglish (US)
Pages (from-to)6134-6150
Number of pages17
JournalChemical Reviews
Issue number13
StatePublished - Jul 6 2017

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: This work was supported by National Natural Science Foundation of China (Grant no. 51602200), Educational Commission of Guangdong Province (Grant no. 2016KZDXM008), Natural Science Foundation of SZU (Grant no. 2017011), and King Abdullah University of Science and Technology, Saudi Arabia. This work was partially supported by the Science and Technology Planning Project of Guangdong Province (Grant no. 2016B050501005), the Educational Commission of Guangdong Province (Grant no. 2016KCXTD006), and Shenzhen Peacock Plan (Grant no. KQTD2016053112042971).


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