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Enhanced performance and SRAM stability in FinFET with reduced process steps for source/drain doping
J. W. Yang*, H. R. Harris, M. M. Hussain, B. Sassman, H. H. Tseng, R. Jammy
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
12
Scopus
citations