Enhanced Etching, Surface Damage Recovery, and Submicron Patterning of Hybrid Perovskites using a Chemically Gas-Assisted Focused-Ion Beam for Subwavelength Grating Photonic Applications

Mohd Sharizal Alias, Yang Yang, Tien Khee Ng, Ibrahim Dursun, Dong Shi, Makhsud I. Saidaminov, Davide Priante, Osman Bakr, Boon S. Ooi

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Material Science