Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm

Engineering

• Low Power Consumption 100%
• Buckling 100%
• Temperature Distribution 100%
• Good Agreement 50%
• Electron Optical Lithography 50%
• Calculated Temperature 50%
• Feature Size 50%
• Confocal Microscope 50%
• Metallic Structure 50%
• Mechanical Design 50%
• Finite Element Method 50%
• High Aspect Ratio 50%

Keyphrases

• Electro-thermal Modeling 100%
• Electro-thermal Analysis 100%
• Electro-thermal Model 50%
• Mechanical Design 50%
• Actuator Arm 50%
• Deflection Value 50%