We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length can be tuned over a range of 40 µm with less than 10 V. The lens exhibits a high compactness and simplicity of fabrication.
|Original language||English (US)|
|Title of host publication||CLEO: Science and Innovations, S and I 2022|
|Publisher||Optica Publishing Group (formerly OSA)|
|State||Published - Jan 1 2022|