Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

Weisheng Yue, Zhihong Wang, Yang Yang, Longqing Chen, Ahad A. Syed, Ka Chun Wong, Xianbin Wang

Research output: Contribution to journalArticlepeer-review

126 Scopus citations


The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. © 2012 IOP Publishing Ltd.
Original languageEnglish (US)
Pages (from-to)125007
JournalJournal of Micromechanics and Microengineering
Issue number12
StatePublished - Oct 26 2012

Bibliographical note

KAUST Repository Item: Exported on 2020-10-01

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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