Electromagnetically Actuated Surface Micromachined Free Standing Torsion Beam Micromirror Made by Electroplated Nickel

Mauro Prasciolu, Alessandro Carpentiero, Rakesh Kumar*, Daunt Cojoc, Stafeno Cabrini, Luca Businaro, Filippo Romanato, Enzo Di Fabrizio, Davide Recchia, Gaberiale Parmigiani

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

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Engineering