Electrochemically activated carbon micro-electrode arrays for electrochemical micro-capacitors

Majid Beidaghi, Wei Chen, Chunlei Wang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

112 Scopus citations


Interdigitated carbon micro-electrode arrays for micro-capacitors are fabricated through the carbon microelectromechanical systems (C-MEMS) technique which is based on the carbonization of patterned photoresist. To improve the capacitive behavior, electrochemical activation is performed on carbon micro-electrode arrays. Cyclic voltammetry (CV) and galvanostatic charge-discharge results demonstrate that the electrochemical activation effectively increases the capacitance of the micro-electrode arrays by three orders of magnitude. Although the charge-discharge experiments show the non-ideal behavior of micro-capacitors, the specific geometric capacitance reaches as high as 75 mF cm-2 at a scan rate of 5 mV s-1 after electrochemical activation for 30 min. The capacitance loss is less than 13% after 1000 CV cycles. These results indicate that electrochemically activated C-MEMS micro-electrode arrays are promising candidates for on-chip electrochemical micro-capacitor application.

Original languageEnglish (US)
Pages (from-to)2403-2409
Number of pages7
JournalJournal of Power Sources
Issue number4
StatePublished - Feb 15 2011


  • Carbon-microelectromechanical systems (C-MEMS)
  • Charge/discharge
  • Cyclic voltammetry
  • Electrochemical activation
  • Electrochemical capacitor

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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