Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

N. Jaber, M. A.A. Hafiz, S. N.R. Kazmi, M. H. Hasan, F. Alsaleem, S. Ilyas, M. I. Younis*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.

Original languageEnglish (US)
Article number319
JournalScientific Reports
Issue number1
StatePublished - Dec 1 2019

Bibliographical note

Funding Information:
We acknowledge financial support from King Abdullah University of Science and Technology.

Publisher Copyright:
© 2019, The Author(s).

ASJC Scopus subject areas

  • General


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