Effects of UV/O3 and O2 plasma surface treatments on the band-bending of ultrathin ALD-Al2O3 coated Ga-polar GaN

Jiarui Gong, Xin Su, Shuoyang Qiu, Jie Zhou, Yang Liu, Yiran Li, Donghyeok Kim, Tsung Han Tsai, Tien Khee Ng, Boon S. Ooi*, Zhenqiang Ma*

*Corresponding author for this work

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