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Effective work function modification of atomic-layer-deposited-TaN film by capping layer
K. Choi*, H. N. Alshareef, H. C. Wen, H. Harris, H. Luan, Y. Senzaki, P. Lysaght, P. Majhi, B. H. Lee
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
45
Scopus
citations