Effect of H2 Content on Reliability of Ultrathin In-Situ Steam Generated (ISSG) SiO2

T. Y. Luo*, M. Laughery, Graham Brown, H. N. Al-Shareef, V. H.C. Watt, A. Karamcheti, M. D. Jackson, H. R. Huff

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Effect of H2 Content on Reliability of Ultrathin In-Situ Steam Generated (ISSG) SiO2'. Together they form a unique fingerprint.

Engineering

Keyphrases

Material Science