Effect of B-site cation stoichiometry on electrical fatigue of RuO2//Pb(ZrxTi1-x)O3//RuO 2 capacitors

H. N. Al-Shareef; B. A. Tuttle; W. L. Warren; T. J. Headley; D. Dimos; J. A. Voigt; R. D. Nasby

doi:10.1063/1.360888

Effect of B-site cation stoichiometry on electrical fatigue of RuO₂//Pb(Zr_xTi_1-x)O₃//RuO ₂ capacitors

H. N. Al-Shareef^*, B. A. Tuttle, W. L. Warren, T. J. Headley, D. Dimos, J. A. Voigt, R. D. Nasby

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

84 Scopus citations

Abstract

There have been numerous reports that Pb(Zr_xTi_1-x)O₃ (PZT) thin-film capacitors with RuO₂ electrodes and compositions near the morphotropic phase boundary exhibit minimal decrease in switched polarization with electric-field cycling. We show that the fatigue performance of RuO₂//PZT//RuO₂ capacitors strongly depends on PZT film composition. Specifically, we demonstrate that the rate of polarization fatigue increases with increasing Ti content for PZT thin films of tetragonal crystal symmetry deposited on RuOelectrodes. As the Ti content of the PZT films increased, the film gain morphology changed from columnar to granular and the volume percent of a fluorite-type second phase decreased. These microstructural trends and the possibility that the electrode material acts as a sink for oxygen vacancies are discussed to explain the fatigue dependence on B-site cation ratio for PZT films with RuO₂ electrodes.

Original language	English (US)
Pages (from-to)	1013-1016
Number of pages	4
Journal	Journal of Applied Physics
Volume	79
Issue number	2
DOIs	https://doi.org/10.1063/1.360888
State	Published - Jan 15 1996
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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title = "Effect of B-site cation stoichiometry on electrical fatigue of RuO2//Pb(ZrxTi1-x)O3//RuO 2 capacitors",

abstract = "There have been numerous reports that Pb(ZrxTi1-x)O3 (PZT) thin-film capacitors with RuO2 electrodes and compositions near the morphotropic phase boundary exhibit minimal decrease in switched polarization with electric-field cycling. We show that the fatigue performance of RuO2//PZT//RuO2 capacitors strongly depends on PZT film composition. Specifically, we demonstrate that the rate of polarization fatigue increases with increasing Ti content for PZT thin films of tetragonal crystal symmetry deposited on RuOelectrodes. As the Ti content of the PZT films increased, the film gain morphology changed from columnar to granular and the volume percent of a fluorite-type second phase decreased. These microstructural trends and the possibility that the electrode material acts as a sink for oxygen vacancies are discussed to explain the fatigue dependence on B-site cation ratio for PZT films with RuO2 electrodes.",

author = "Al-Shareef, {H. N.} and Tuttle, {B. A.} and Warren, {W. L.} and Headley, {T. J.} and D. Dimos and Voigt, {J. A.} and Nasby, {R. D.}",

year = "1996",

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doi = "10.1063/1.360888",

language = "English (US)",

volume = "79",

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TY - JOUR

T1 - Effect of B-site cation stoichiometry on electrical fatigue of RuO2//Pb(ZrxTi1-x)O3//RuO 2 capacitors

AU - Al-Shareef, H. N.

AU - Tuttle, B. A.

AU - Warren, W. L.

AU - Headley, T. J.

AU - Dimos, D.

AU - Voigt, J. A.

AU - Nasby, R. D.

PY - 1996/1/15

Y1 - 1996/1/15

N2 - There have been numerous reports that Pb(ZrxTi1-x)O3 (PZT) thin-film capacitors with RuO2 electrodes and compositions near the morphotropic phase boundary exhibit minimal decrease in switched polarization with electric-field cycling. We show that the fatigue performance of RuO2//PZT//RuO2 capacitors strongly depends on PZT film composition. Specifically, we demonstrate that the rate of polarization fatigue increases with increasing Ti content for PZT thin films of tetragonal crystal symmetry deposited on RuOelectrodes. As the Ti content of the PZT films increased, the film gain morphology changed from columnar to granular and the volume percent of a fluorite-type second phase decreased. These microstructural trends and the possibility that the electrode material acts as a sink for oxygen vacancies are discussed to explain the fatigue dependence on B-site cation ratio for PZT films with RuO2 electrodes.

AB - There have been numerous reports that Pb(ZrxTi1-x)O3 (PZT) thin-film capacitors with RuO2 electrodes and compositions near the morphotropic phase boundary exhibit minimal decrease in switched polarization with electric-field cycling. We show that the fatigue performance of RuO2//PZT//RuO2 capacitors strongly depends on PZT film composition. Specifically, we demonstrate that the rate of polarization fatigue increases with increasing Ti content for PZT thin films of tetragonal crystal symmetry deposited on RuOelectrodes. As the Ti content of the PZT films increased, the film gain morphology changed from columnar to granular and the volume percent of a fluorite-type second phase decreased. These microstructural trends and the possibility that the electrode material acts as a sink for oxygen vacancies are discussed to explain the fatigue dependence on B-site cation ratio for PZT films with RuO2 electrodes.

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JO - Journal of Applied Physics

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IS - 2

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Effect of B-site cation stoichiometry on electrical fatigue of RuO₂//Pb(Zr_xTi_1-x)O₃//RuO ₂ capacitors

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