Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS

Laura Ruzziconi; Mohammad I. Younis; Stefano Lenci

doi:10.1007/978-94-007-5742-420

Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS

Laura Ruzziconi^*, Mohammad I. Younis, Stefano Lenci

^*Corresponding author for this work

Physical Sciences and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

17 Scopus citations

Abstract

A dynamical integrity analysis is performed for an electrostatic microelectro- mechanical system (MEMS) device. The analysis starts from the experimental data of dynamic pull-in due to a frequency-sweeping process in a capacitive accelerometer. The loss of dynamical integrity is investigated by curves of constant percentage of integrity factor. We found that these curves follow exactly the experimental data and succeed in interpreting the existence of disturbances. On the other hand, instead, the theoretical curves of disappearance of the attractors represent the limit when disturbances are absent, which never occurs in practice. Also, the obtained behavior chart can serve as a design guideline in order to ensure safety of the device.

Original language	English (US)
Title of host publication	IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design
Editors	Giuseppe Rega, Marian Wiercigroch
Publisher	Springer Verlag
Pages	249-261
Number of pages	13
ISBN (Print)	9789400757417
DOIs	https://doi.org/10.1007/978-94-007-5742-420
State	Published - 2013
Event	IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design, 2010 - Aberdeen, United Kingdom Duration: Jul 27 2010 → Jul 30 2010

Publication series

Name	IUTAM Bookseries
Volume	32
ISSN (Print)	1875-3507

Conference

Conference	IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design, 2010
Country/Territory	United Kingdom
City	Aberdeen
Period	07/27/10 → 07/30/10

Bibliographical note

Publisher Copyright:
© Springer Science+Business Media Dordrecht 2013.

Keywords

Dynamic pull-in
Dynamical integrity
Integrity factor
MEMS

ASJC Scopus subject areas

Mechanical Engineering
Aerospace Engineering
Automotive Engineering
Acoustics and Ultrasonics
Civil and Structural Engineering

Access to Document

10.1007/978-94-007-5742-420

Cite this

Ruzziconi, L., Younis, M. I., & Lenci, S. (2013). Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS. In G. Rega, & M. Wiercigroch (Eds.), IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design (pp. 249-261). (IUTAM Bookseries; Vol. 32). Springer Verlag. https://doi.org/10.1007/978-94-007-5742-420

Ruzziconi, Laura ; Younis, Mohammad I. ; Lenci, Stefano. / Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS. IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design. editor / Giuseppe Rega ; Marian Wiercigroch. Springer Verlag, 2013. pp. 249-261 (IUTAM Bookseries).

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abstract = "A dynamical integrity analysis is performed for an electrostatic microelectro- mechanical system (MEMS) device. The analysis starts from the experimental data of dynamic pull-in due to a frequency-sweeping process in a capacitive accelerometer. The loss of dynamical integrity is investigated by curves of constant percentage of integrity factor. We found that these curves follow exactly the experimental data and succeed in interpreting the existence of disturbances. On the other hand, instead, the theoretical curves of disappearance of the attractors represent the limit when disturbances are absent, which never occurs in practice. Also, the obtained behavior chart can serve as a design guideline in order to ensure safety of the device.",

keywords = "Dynamic pull-in, Dynamical integrity, Integrity factor, MEMS",

author = "Laura Ruzziconi and Younis, {Mohammad I.} and Stefano Lenci",

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Ruzziconi, L, Younis, MI & Lenci, S 2013, Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS. in G Rega & M Wiercigroch (eds), IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design. IUTAM Bookseries, vol. 32, Springer Verlag, pp. 249-261, IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design, 2010, Aberdeen, United Kingdom, 07/27/10. https://doi.org/10.1007/978-94-007-5742-420

Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS. / Ruzziconi, Laura; Younis, Mohammad I.; Lenci, Stefano.
IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design. ed. / Giuseppe Rega; Marian Wiercigroch. Springer Verlag, 2013. p. 249-261 (IUTAM Bookseries; Vol. 32).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS

AU - Ruzziconi, Laura

AU - Younis, Mohammad I.

AU - Lenci, Stefano

N1 - Publisher Copyright: © Springer Science+Business Media Dordrecht 2013.

PY - 2013

Y1 - 2013

N2 - A dynamical integrity analysis is performed for an electrostatic microelectro- mechanical system (MEMS) device. The analysis starts from the experimental data of dynamic pull-in due to a frequency-sweeping process in a capacitive accelerometer. The loss of dynamical integrity is investigated by curves of constant percentage of integrity factor. We found that these curves follow exactly the experimental data and succeed in interpreting the existence of disturbances. On the other hand, instead, the theoretical curves of disappearance of the attractors represent the limit when disturbances are absent, which never occurs in practice. Also, the obtained behavior chart can serve as a design guideline in order to ensure safety of the device.

AB - A dynamical integrity analysis is performed for an electrostatic microelectro- mechanical system (MEMS) device. The analysis starts from the experimental data of dynamic pull-in due to a frequency-sweeping process in a capacitive accelerometer. The loss of dynamical integrity is investigated by curves of constant percentage of integrity factor. We found that these curves follow exactly the experimental data and succeed in interpreting the existence of disturbances. On the other hand, instead, the theoretical curves of disappearance of the attractors represent the limit when disturbances are absent, which never occurs in practice. Also, the obtained behavior chart can serve as a design guideline in order to ensure safety of the device.

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KW - Dynamical integrity

KW - Integrity factor

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BT - IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design

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Ruzziconi L, Younis MI, Lenci S. Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS. In Rega G, Wiercigroch M, editors, IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design. Springer Verlag. 2013. p. 249-261. (IUTAM Bookseries). doi: 10.1007/978-94-007-5742-420

Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS

Abstract

Publication series

Conference

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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