Dynamic response of MEMS sensor near fundamental and higher-order frequencies

Hassen M. Ouakad; Mohammad I. Younis

doi:10.1109/ICSENS.2014.6985415

Dynamic response of MEMS sensor near fundamental and higher-order frequencies

Hassen M. Ouakad, Mohammad I. Younis

Physical Sciences and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We present a theoretical and experimental investigations into the dynamic response of initially curved microbeams (arches) near their fundamental as well as higher-order frequencies. A reduced-order model based on a nonlinear Euler-Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and its geometric nonlinearities (mid-plane stretching and initial curvature). Simulation results are presented showing the combined effect of the nonlinear electrostatic force and the initial curvature in triggering the so-called snap-through instability of the investigated microbeams. For the experimental part, two micromachined initally curved beams made of polysilicon were subjected to DC and AC harmonic loads. Several experimental data are shown demonstrating softening and hardening behaviors of the considered structures near their first and third natural frequencies, respectively, as well as a possible dynamic snap-through motion.

Original language	English (US)
Title of host publication	IEEE SENSORS 2014, Proceedings
Editors	Francisco J. Arregui
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1956-1959
Number of pages	4
Edition	December
ISBN (Electronic)	9781479901616
DOIs	https://doi.org/10.1109/ICSENS.2014.6985415
State	Published - Dec 12 2014
Event	13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain Duration: Nov 2 2014 → Nov 5 2014

Publication series

Name	Proceedings of IEEE Sensors
Number	December
Volume	2014-December
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	13th IEEE SENSORS Conference, SENSORS 2014
Country/Territory	Spain
City	Valencia
Period	11/2/14 → 11/5/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Keywords

Dynamic
Fundamental frequency
Higher-order frequency
MEMS
Sensors

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2014.6985415

Cite this

Ouakad, H. M., & Younis, M. I. (2014). Dynamic response of MEMS sensor near fundamental and higher-order frequencies. In F. J. Arregui (Ed.), IEEE SENSORS 2014, Proceedings (December ed., pp. 1956-1959). Article 6985415 (Proceedings of IEEE Sensors; Vol. 2014-December, No. December). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2014.6985415

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title = "Dynamic response of MEMS sensor near fundamental and higher-order frequencies",

abstract = "We present a theoretical and experimental investigations into the dynamic response of initially curved microbeams (arches) near their fundamental as well as higher-order frequencies. A reduced-order model based on a nonlinear Euler-Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and its geometric nonlinearities (mid-plane stretching and initial curvature). Simulation results are presented showing the combined effect of the nonlinear electrostatic force and the initial curvature in triggering the so-called snap-through instability of the investigated microbeams. For the experimental part, two micromachined initally curved beams made of polysilicon were subjected to DC and AC harmonic loads. Several experimental data are shown demonstrating softening and hardening behaviors of the considered structures near their first and third natural frequencies, respectively, as well as a possible dynamic snap-through motion.",

keywords = "Dynamic, Fundamental frequency, Higher-order frequency, MEMS, Sensors",

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Ouakad, HM & Younis, MI 2014, Dynamic response of MEMS sensor near fundamental and higher-order frequencies. in FJ Arregui (ed.), IEEE SENSORS 2014, Proceedings. December edn, 6985415, Proceedings of IEEE Sensors, no. December, vol. 2014-December, Institute of Electrical and Electronics Engineers Inc., pp. 1956-1959, 13th IEEE SENSORS Conference, SENSORS 2014, Valencia, Spain, 11/2/14. https://doi.org/10.1109/ICSENS.2014.6985415

Dynamic response of MEMS sensor near fundamental and higher-order frequencies. / Ouakad, Hassen M.; Younis, Mohammad I.
IEEE SENSORS 2014, Proceedings. ed. / Francisco J. Arregui. December. ed. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1956-1959 6985415 (Proceedings of IEEE Sensors; Vol. 2014-December, No. December).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - We present a theoretical and experimental investigations into the dynamic response of initially curved microbeams (arches) near their fundamental as well as higher-order frequencies. A reduced-order model based on a nonlinear Euler-Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and its geometric nonlinearities (mid-plane stretching and initial curvature). Simulation results are presented showing the combined effect of the nonlinear electrostatic force and the initial curvature in triggering the so-called snap-through instability of the investigated microbeams. For the experimental part, two micromachined initally curved beams made of polysilicon were subjected to DC and AC harmonic loads. Several experimental data are shown demonstrating softening and hardening behaviors of the considered structures near their first and third natural frequencies, respectively, as well as a possible dynamic snap-through motion.

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Dynamic response of MEMS sensor near fundamental and higher-order frequencies

Abstract

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Keywords

ASJC Scopus subject areas

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