Dynamic response of MEMS sensor near fundamental and higher-order frequencies

Hassen M. Ouakad, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

We present a theoretical and experimental investigations into the dynamic response of initially curved microbeams (arches) near their fundamental as well as higher-order frequencies. A reduced-order model based on a nonlinear Euler-Bernoulli beam model is utilized. The model accounts for the electrostatic bias on the microbeam and its geometric nonlinearities (mid-plane stretching and initial curvature). Simulation results are presented showing the combined effect of the nonlinear electrostatic force and the initial curvature in triggering the so-called snap-through instability of the investigated microbeams. For the experimental part, two micromachined initally curved beams made of polysilicon were subjected to DC and AC harmonic loads. Several experimental data are shown demonstrating softening and hardening behaviors of the considered structures near their first and third natural frequencies, respectively, as well as a possible dynamic snap-through motion.

Original languageEnglish (US)
Title of host publicationIEEE SENSORS 2014, Proceedings
EditorsFrancisco J. Arregui
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1956-1959
Number of pages4
EditionDecember
ISBN (Electronic)9781479901616
DOIs
StatePublished - Dec 12 2014
Event13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain
Duration: Nov 2 2014Nov 5 2014

Publication series

NameProceedings of IEEE Sensors
NumberDecember
Volume2014-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference13th IEEE SENSORS Conference, SENSORS 2014
Country/TerritorySpain
CityValencia
Period11/2/1411/5/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

Keywords

  • Dynamic
  • Fundamental frequency
  • Higher-order frequency
  • MEMS
  • Sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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