Dynamic pull-in phenomenon in MEMS resonators

Ali H. Nayfeh; Mohammad I. Younis; Eihab M. Abdel-Rahman

doi:10.1007/s11071-006-9079-z

Dynamic pull-in phenomenon in MEMS resonators

Ali H. Nayfeh^*, Mohammad I. Younis, Eihab M. Abdel-Rahman

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

442 Scopus citations

Abstract

We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.

Original language	English (US)
Pages (from-to)	153-163
Number of pages	11
Journal	Nonlinear Dynamics
Volume	48
Issue number	1-2
DOIs	https://doi.org/10.1007/s11071-006-9079-z
State	Published - Apr 2007
Externally published	Yes

Keywords

Electric actuation
MEMS
Microbeams
Primary resonance
Pull-in
Resonators

ASJC Scopus subject areas

Mechanical Engineering
Aerospace Engineering
Ocean Engineering
Applied Mathematics
Electrical and Electronic Engineering
Control and Systems Engineering

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10.1007/s11071-006-9079-z

Cite this

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title = "Dynamic pull-in phenomenon in MEMS resonators",

abstract = "We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.",

keywords = "Electric actuation, MEMS, Microbeams, Primary resonance, Pull-in, Resonators",

author = "Nayfeh, {Ali H.} and Younis, {Mohammad I.} and Abdel-Rahman, {Eihab M.}",

year = "2007",

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doi = "10.1007/s11071-006-9079-z",

language = "English (US)",

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journal = "Nonlinear Dynamics",

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T1 - Dynamic pull-in phenomenon in MEMS resonators

AU - Nayfeh, Ali H.

AU - Younis, Mohammad I.

AU - Abdel-Rahman, Eihab M.

PY - 2007/4

Y1 - 2007/4

N2 - We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.

AB - We study the pull-in instability in microelectromechanical (MEMS) resonators and find that characteristics of the pull-in phenomenon in the presence of AC loads differ from those under purely DC loads. We analyze this phenomenon, dubbed dynamic pull-in, and formulate safety criteria for the design of MEMS resonant sensors and filters excited near one of their natural frequencies. We also utilize this phenomenon to design a low-voltage MEMS RF switch actuated with a combined DC and AC loading. The new switch uses a voltage much lower than the traditionally used DC voltage. Either the frequency or the amplitude of the AC loading can be adjusted to reduce the driving voltage and switching time. The new actuation method has the potential of solving the problem of high driving voltages of RF MEMS switches.

KW - Electric actuation

KW - MEMS

KW - Microbeams

KW - Primary resonance

KW - Pull-in

KW - Resonators

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DO - 10.1007/s11071-006-9079-z

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Dynamic pull-in phenomenon in MEMS resonators

Abstract

Keywords

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