Dynamic optical response of SU-8 upon UV treatment

Alok Ghanekar, Matthew Ricci, Yanpei Tian, Otto Gregory, Yi Zheng

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We report the optical properties of SU-8 in the mid-infrared (mid-IR) region before and after UV treatment. Samples consisted of SU-8 films of thickness ranging from 10 um to 157 um deposited on gold coated silicon substrates and were prepared using spin coating. Mid-IR diffuse reflectance measurements were conducted using Fourier transform infrared spectroscopy. Spectra measurements imply a change in optical properties of SU-8 upon exposure to UV and heat treatment. A gradual change in optical properties is seen after each step of UV treatment and the baking process. Reflectance spectra of thin-films were also observed to be thickness dependent. We calculate the dielectric function of SU-8 in the range 2 um to 15 um using the reflectance spectra of the samples.
Original languageEnglish (US)
Pages (from-to)2017-2025
Number of pages9
JournalOPTICAL MATERIALS EXPRESS
Volume8
Issue number7
DOIs
StatePublished - Jan 1 2018
Externally publishedYes

Bibliographical note

Generated from Scopus record by KAUST IRTS on 2023-09-23

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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