Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon

M. O. Sallam, E. A. Soliman, S. Hassan, S. Sedky

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations


A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.
Original languageEnglish (US)
Title of host publication41st European Microwave Conference (EuMC)
Number of pages4
StatePublished - 2011
Externally publishedYes

Bibliographical note

KAUST Repository Item: Exported on 2022-06-23
Acknowledged KAUST grant number(s): UK-C0015 OUK
Acknowledgements: This publication is based on work supported by award number: UK-C0015 OUK made by King Abdullah University of Science and Technology (KAUST).
This publication acknowledges KAUST support, but has no KAUST affiliated authors.


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