TY - GEN
T1 - Direct measurement of graphene contact resistivity to pre-deposited metal in buried contact test structure
AU - Qaisi, Ramy M.
AU - Smith, Casey
AU - Ghoneim, Mohamed T.
AU - Yu, Qingkai
AU - Hussain, Muhammad Mustafa
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2013/8
Y1 - 2013/8
N2 - We demonstrate a buried contact based novel test structure for direct contact resistivity measurement of graphene-metal interfaces. We also observe excellent contact resistivity 1 μO-cm2 without any additional surface modification suggesting that the intrinsic Au-graphene contact is sufficient for achieving devices with low contact resistance. The chemical mechanical polishing less test structure and data described herein highlights an ideal methodology for systematic screening and engineering of graphene-metal contact resistivity to enable low power high speed carbon electronics. © 2013 IEEE.
AB - We demonstrate a buried contact based novel test structure for direct contact resistivity measurement of graphene-metal interfaces. We also observe excellent contact resistivity 1 μO-cm2 without any additional surface modification suggesting that the intrinsic Au-graphene contact is sufficient for achieving devices with low contact resistance. The chemical mechanical polishing less test structure and data described herein highlights an ideal methodology for systematic screening and engineering of graphene-metal contact resistivity to enable low power high speed carbon electronics. © 2013 IEEE.
UR - http://hdl.handle.net/10754/564786
UR - http://ieeexplore.ieee.org/document/6720966/
UR - http://www.scopus.com/inward/record.url?scp=84894145827&partnerID=8YFLogxK
U2 - 10.1109/NANO.2013.6720966
DO - 10.1109/NANO.2013.6720966
M3 - Conference contribution
SN - 9781479906758
SP - 890
EP - 893
BT - 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -