Digital Holography Microscopy (DHM) operating in pulsed stroboscopic mode: A versatile metrology instrument for micro and nano technology

Frédéric Montfort*, François Marquet, Etienne Cuche, Nicolas Aspert, Eduardo Solanas, Yves Emery, Christian Depeursinge

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

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Engineering