Digital holographic reflectometry

Tristan Colomb; Stefan Krivec; Herbert Hutter; Ahmet Ata Akatay; Nicolas Pavillon; Frédéric Montfort; Etienne Cuche; Jonas Kühn; Christian Depeursinge; Yves Emery

doi:10.1364/OE.18.003719

Digital holographic reflectometry

Tristan Colomb^*, Stefan Krivec, Herbert Hutter, Ahmet Ata Akatay, Nicolas Pavillon, Frédéric Montfort, Etienne Cuche, Jonas Kühn, Christian Depeursinge, Yves Emery

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

44 Scopus citations

Abstract

Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO₂/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

Original language	English (US)
Pages (from-to)	3719-3731
Number of pages	13
Journal	Optics Express
Volume	18
Issue number	4
DOIs	https://doi.org/10.1364/OE.18.003719
State	Published - Feb 15 2010
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.18.003719

Cite this

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abstract = "Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.",

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T1 - Digital holographic reflectometry

AU - Colomb, Tristan

AU - Krivec, Stefan

AU - Hutter, Herbert

AU - Akatay, Ahmet Ata

AU - Pavillon, Nicolas

AU - Montfort, Frédéric

AU - Cuche, Etienne

AU - Kühn, Jonas

AU - Depeursinge, Christian

AU - Emery, Yves

PY - 2010/2/15

Y1 - 2010/2/15

N2 - Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

AB - Digital holographic microscopy (DHM) is an interferometric technique that allows real-time imaging of the entire complex optical wavefront (amplitude and phase) reflected by or transmitted through a sample. To our knowledge, only the quantitative phase is exploited to measure topography, assuming homogeneous material sample and a single reflection on the surface of the sample. In this paper, dual-wavelength DHM measurements are interpreted using a model of reflected wave propagation through a three-interfaces specimen (2 layers deposited on a semi-infinite layer), to measure simultaneously topography, layer thicknesses and refractive indices of micro-structures. We demonstrate this DHM reflectometry technique by comparing DHM and profilometer measurement of home-made SiO2/Si targets and Secondary Ion Mass Spectrometry (SIMS) sputter craters on specimen including different multiple layers.

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Digital holographic reflectometry

Abstract

ASJC Scopus subject areas

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