Digital holographic microscopy for nanometric quality control of micro-optical components

Jonas Kühn*, Florian Charrière, Tristan Colomb, Etienne Cuche, Yves Emery, Christian Depeursinge

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

14 Scopus citations


In this paper, Digital Holographic Microscopy (DHM) is presented as a powerful tool for quality control of micro-optical components. It will be shown that not only the single-shot full field-of-view nanometer axial resolution makes DHM an ideal solution for such samples, but the DHM numerical wavefront correction formalism is perfectly adapted to provide advanced features like aberration coefficients, radius of curvature or optical surfaces roughness measurements. Both transmission and reflection configurations can be used depending of the micro-components under investigation. A transparent high aspect-ratio micro-components investigation procedure is also exposed in order to unable phase unwrapping. Each feature is illustrated with typical examples, ranging from a wide variety of micro-lenses (aspherical, cylindrical, squared) to cornercube micro-structures or diffractive elements.

Original languageEnglish (US)
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XI
StatePublished - May 24 2007
EventIntegrated Optics: Devices, Materials, and Technologies XI - San Jose, CA, United States
Duration: Jan 22 2007Jan 24 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherIntegrated Optics: Devices, Materials, and Technologies XI
Country/TerritoryUnited States
CitySan Jose, CA


  • Aberrations
  • Digital holography
  • Metrology
  • Micro-lenses
  • Micro-optics
  • Microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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