Digital holographic microscopy for comparative metrology in micro-optics and MOEMs

Christian Depeursinge; Florian Charrière; Frédéric Montfort

doi:10.1524/teme.2006.73.3.172

Digital holographic microscopy for comparative metrology in micro-optics and MOEMs

Christian Depeursinge^*, Florian Charrière, Frédéric Montfort

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Digital holographic microscopy (DHM) is an imaging technique, which can be applied to the visualisation and metrology of microscopic objects. It has been established in the frame of the DISCO project that DHM can be considered as an efficient method for direct comparison of the shape or deformations of two objects. "Comparison DHM" allows a straight comparison with a gauge provided by a manufacturer or customer. The phase subtraction between ideal and actual wavefront of the object provides data equivalent to those given by a Twyman-Green or a Mach-Zehnder interferometer.

Original language	English (US)
Pages (from-to)	172-178
Number of pages	7
Journal	Technisches Messen
Volume	73
Issue number	3
DOIs	https://doi.org/10.1524/teme.2006.73.3.172
State	Published - 2006
Externally published	Yes

Keywords

Digital holography
Metrology
Micro-optics

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

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10.1524/teme.2006.73.3.172

Cite this

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AU - Montfort, Frédéric

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AB - Digital holographic microscopy (DHM) is an imaging technique, which can be applied to the visualisation and metrology of microscopic objects. It has been established in the frame of the DISCO project that DHM can be considered as an efficient method for direct comparison of the shape or deformations of two objects. "Comparison DHM" allows a straight comparison with a gauge provided by a manufacturer or customer. The phase subtraction between ideal and actual wavefront of the object provides data equivalent to those given by a Twyman-Green or a Mach-Zehnder interferometer.

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Digital holographic microscopy for comparative metrology in micro-optics and MOEMs

Abstract

Keywords

ASJC Scopus subject areas

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