Abstract
Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.
Original language | English (US) |
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Title of host publication | MEMS, MOEMS, and Micromachining II |
Volume | 6186 |
DOIs | |
State | Published - 2006 |
Externally published | Yes |
Event | MEMS, MOEMS, and Micromachining II - Strasbourg, France Duration: Apr 3 2006 → Apr 4 2006 |
Other
Other | MEMS, MOEMS, and Micromachining II |
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Country/Territory | France |
City | Strasbourg |
Period | 04/3/06 → 04/4/06 |
Keywords
- Digital Holography Microscopy
- MEMS
- MOEMS
- Real time 3D optical topography
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics