Digital holographic microscopy applied to metrology

Christian D. Depeursinge; Florian Charrière; Anca M. Marian; Frederic Montfort; Tristan Colomb; Jonas Kühn; Etienne Cuche; Y. Emery; Pierre Marquet; Pierre J. Magistretti

doi:10.1117/12.546014

Digital holographic microscopy applied to metrology

Christian D. Depeursinge^*, Florian Charrière, Anca M. Marian, Frederic Montfort, Tristan Colomb, Jonas Kühn, Etienne Cuche, Y. Emery, Pierre Marquet, Pierre J. Magistretti

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

Original language	English (US)
Pages (from-to)	504-512
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5457
DOIs	https://doi.org/10.1117/12.546014
State	Published - 2004
Externally published	Yes
Event	Optical Metrology in Production Engineering - Strasbourg, France Duration: Apr 27 2004 → Apr 30 2004

Keywords

Holography
Microscopy
Phase contrast
Surface metrology

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Applied Mathematics
Electrical and Electronic Engineering
Computer Science Applications

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10.1117/12.546014

Cite this

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title = "Digital holographic microscopy applied to metrology",

abstract = "We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.",

keywords = "Holography, Microscopy, Phase contrast, Surface metrology",

author = "Depeursinge, {Christian D.} and Florian Charri{\`e}re and Marian, {Anca M.} and Frederic Montfort and Tristan Colomb and Jonas K{\"u}hn and Etienne Cuche and Y. Emery and Pierre Marquet and Magistretti, {Pierre J.}",

year = "2004",

doi = "10.1117/12.546014",

language = "English (US)",

volume = "5457",

pages = "504--512",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optical Metrology in Production Engineering ; Conference date: 27-04-2004 Through 30-04-2004",

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TY - JOUR

T1 - Digital holographic microscopy applied to metrology

AU - Depeursinge, Christian D.

AU - Charrière, Florian

AU - Marian, Anca M.

AU - Montfort, Frederic

AU - Colomb, Tristan

AU - Kühn, Jonas

AU - Cuche, Etienne

AU - Emery, Y.

AU - Marquet, Pierre

AU - Magistretti, Pierre J.

PY - 2004

Y1 - 2004

N2 - We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

AB - We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

KW - Holography

KW - Microscopy

KW - Phase contrast

KW - Surface metrology

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U2 - 10.1117/12.546014

DO - 10.1117/12.546014

M3 - Conference article

AN - SCOPUS:10044241639

SN - 0277-786X

VL - 5457

SP - 504

EP - 512

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Metrology in Production Engineering

Y2 - 27 April 2004 through 30 April 2004

ER -

Digital holographic microscopy applied to metrology

Abstract

Keywords

ASJC Scopus subject areas

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