Diffractive optical elements in titanium oxide for MOEMS applications

V. K. Parashar; A. Sayah; E. Cuche; C. Depeursinge; M. A.M. Gijs

doi:10.1109/SENSOR.2003.1217057

Diffractive optical elements in titanium oxide for MOEMS applications

V. K. Parashar, A. Sayah, E. Cuche, C. Depeursinge, M. A.M. Gijs

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO₂ microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1482-1485
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1217057
State	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	06/8/03 → 06/12/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Diffraction gratings
Fresnel reflection
Glass
Microstructure
Nanostructures
Optical diffraction
Optical polymers
Optical refraction
Optical variables control
Titanium

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1217057

Cite this

Parashar, V. K., Sayah, A., Cuche, E., Depeursinge, C., & Gijs, M. A. M. (2003). Diffractive optical elements in titanium oxide for MOEMS applications. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1482-1485). Article 1217057 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217057

Parashar, V. K. ; Sayah, A. ; Cuche, E. et al. / Diffractive optical elements in titanium oxide for MOEMS applications. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1482-1485 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{7c117af3942f4d659d9efc744a2a8f07,

title = "Diffractive optical elements in titanium oxide for MOEMS applications",

abstract = "We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO2 microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.",

keywords = "Diffraction gratings, Fresnel reflection, Glass, Microstructure, Nanostructures, Optical diffraction, Optical polymers, Optical refraction, Optical variables control, Titanium",

author = "Parashar, {V. K.} and A. Sayah and E. Cuche and C. Depeursinge and Gijs, {M. A.M.}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1217057",

language = "English (US)",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1482--1485",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

address = "United States",

}

Parashar, VK, Sayah, A, Cuche, E, Depeursinge, C & Gijs, MAM 2003, Diffractive optical elements in titanium oxide for MOEMS applications. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217057, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1482-1485, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 06/8/03. https://doi.org/10.1109/SENSOR.2003.1217057

Diffractive optical elements in titanium oxide for MOEMS applications. / Parashar, V. K.; Sayah, A.; Cuche, E. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1482-1485 1217057 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Diffractive optical elements in titanium oxide for MOEMS applications

AU - Parashar, V. K.

AU - Sayah, A.

AU - Cuche, E.

AU - Depeursinge, C.

AU - Gijs, M. A.M.

PY - 2003

Y1 - 2003

N2 - We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO2 microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.

AB - We demonstrate a new technology for the replication of titanium oxide glass micro- and nanostructures. Diffractive optical elements, like gratings, and Fresnel lenses with structural features down to 600 nm, are replicated in polymer moulds starting from liquid glass solutions. The salient features of the TiO2 microstructures are: a high refractive index (of the order of 1.95-1.99), excellent transparence in the visible range and photocatalytic activity under UV illumination, which induces super-hydrophilicity. The latter property is of importance for anti-fogging and self-cleaning properties of the optical structures.

KW - Diffraction gratings

KW - Fresnel reflection

KW - Glass

KW - Microstructure

KW - Nanostructures

KW - Optical diffraction

KW - Optical polymers

KW - Optical refraction

KW - Optical variables control

KW - Titanium

UR - http://www.scopus.com/inward/record.url?scp=3042739563&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2003.1217057

DO - 10.1109/SENSOR.2003.1217057

M3 - Conference contribution

AN - SCOPUS:3042739563

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1482

EP - 1485

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Parashar VK, Sayah A, Cuche E, Depeursinge C, Gijs MAM. Diffractive optical elements in titanium oxide for MOEMS applications. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1482-1485. 1217057. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1217057

Diffractive optical elements in titanium oxide for MOEMS applications

Abstract

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Bibliographical note

Keywords

ASJC Scopus subject areas

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