Chemistry
Electronic Transition
100%
Desorption
100%
Ruthenium
100%
Lithography
100%
Reflectivity
33%
Photoexcitation
33%
Methyl Methacrylate
33%
Surface Chemistry
33%
Electron Irradiation
33%
Multilayer
33%
Material Science
Ruthenium
100%
Desorption
100%
Extreme-Ultraviolet Lithography
100%
Adsorbate
33%
Reflectivity
33%
Electron Irradiation
33%
Oxidation Reaction
33%
Radiation Damage
33%
Engineering
Extreme-Ultraviolet Lithography
100%
Secondary Electrons
66%
Capping Layer
33%
Induced Surface
33%
Photon Energy
33%
Ev Electron
33%
Radiation Effect
33%
Adsorbate
33%
Cross Section
33%
Physics
Desorption
100%
Lithography
100%
Radiation Effect
33%
Photoexcitation
33%
Electron Irradiation
33%
Keyphrases
Desorption Induced by Electronic Transitions
100%
Secondary Electron Yield
33%
Background Impurity
33%