Development of untethered SU-8 polymer scratch drive microrobots

Manuel Valencia Garcia; Tarek Nabil Atallah; David Castro; David Conchouso Gonzalez; Mishari Ibraheem Al Dosari; Rafat Hammad; Ehab Jamal Al Rawashdeh; Amir Omar Zaher; Jürgen Kosel; Ian G. Foulds

doi:10.1109/MEMSYS.2011.5734652

Development of untethered SU-8 polymer scratch drive microrobots

Manuel Valencia Garcia, Tarek Nabil Atallah, David Castro, David Conchouso Gonzalez, Mishari Ibraheem Al Dosari, Rafat Hammad, Ehab Jamal Al Rawashdeh, Amir Omar Zaher, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Scopus citations

Abstract

This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.

Original language	English (US)
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1221-1224
Number of pages	4
ISBN (Print)	9781424496327
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734652
State	Published - Jan 2011

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KAUST Repository Item: Exported on 2020-10-01

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10.1109/MEMSYS.2011.5734652

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Valencia Garcia, M., Atallah, T. N., Castro, D., Conchouso Gonzalez, D., Al Dosari, M. I., Hammad, R., Al Rawashdeh, E. J., Zaher, A. O., Kosel, J., & Foulds, I. G. (2011). Development of untethered SU-8 polymer scratch drive microrobots. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (pp. 1221-1224). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/MEMSYS.2011.5734652

@inproceedings{c919aa24443f4e92811cb55592e5c12a,

title = "Development of untethered SU-8 polymer scratch drive microrobots",

abstract = "This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.",

author = "{Valencia Garcia}, Manuel and Atallah, {Tarek Nabil} and David Castro and {Conchouso Gonzalez}, David and {Al Dosari}, {Mishari Ibraheem} and Rafat Hammad and {Al Rawashdeh}, {Ehab Jamal} and Zaher, {Amir Omar} and J{\"u}rgen Kosel and Foulds, {Ian G.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2011",

month = jan,

doi = "10.1109/MEMSYS.2011.5734652",

language = "English (US)",

isbn = "9781424496327",

pages = "1221--1224",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

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Valencia Garcia, M, Atallah, TN, Castro, D, Conchouso Gonzalez, D, Al Dosari, MI, Hammad, R, Al Rawashdeh, EJ, Zaher, AO, Kosel, J & Foulds, IG 2011, Development of untethered SU-8 polymer scratch drive microrobots. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers (IEEE), pp. 1221-1224. https://doi.org/10.1109/MEMSYS.2011.5734652

Development of untethered SU-8 polymer scratch drive microrobots. / Valencia Garcia, Manuel; Atallah, Tarek Nabil; Castro, David et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers (IEEE), 2011. p. 1221-1224.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Valencia Garcia, Manuel

AU - Atallah, Tarek Nabil

AU - Castro, David

AU - Conchouso Gonzalez, David

AU - Al Dosari, Mishari Ibraheem

AU - Hammad, Rafat

AU - Al Rawashdeh, Ehab Jamal

AU - Zaher, Amir Omar

AU - Kosel, Jürgen

AU - Foulds, Ian G.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2011/1

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N2 - This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.

AB - This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.

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BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers (IEEE)

ER -

Development of untethered SU-8 polymer scratch drive microrobots

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